| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive surface sensor capable of sensing a two-dimensional sensing domain of an object with high sensitivity at high speed. SOLUTION: This surface sensor 10 is equipped with a light source 1 for transmitting a light signal having a wavelength ofλ1-λ3, optical paths b1-b5 through which a light signal transmitted from the light source 1 is propagated, crossing parts a1-a4 where the optical paths cross each other, an optical sensor part 3 where the plurality of optical paths b1-b5 are arranged two-dimensionally on an object 2, and a wavemeter 4 for detecting the light signal having the wavelength ofλ1-λ3 by receiving output light from the optical sensor part 3 for each wavelength. The optical sensor part 3 is provided with either of a branching filter and a multiplexer on the crossing parts a1-a4 so that one light signal having a different wavelength or two or more light signals having each different combination of wavelengths are propagated through each of the plurality of optical paths b1-b5. COPYRIGHT: (C)2009,JPO&INPIT
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