| 摘要 |
The invention relates to a method for producing a mechanoelectrical microgenerator, comprising the following steps: deposition (200), on an electroconductive thin substrate forming a lower electrode, of a thin layer of piezoelectric material, called an active layer; deposition (220), on the active layer, of a thin layer of electroconductive material forming an upper electrode, so as to form a base structure made up of thin layers; and encapsulation (230) of said base structure in a thin coating layer based on at least one elastically deformable polymer material. |
