Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film

摘要

A hard film for cutting tools which is composed of (Ti1-a-b-c-d,Ala,Crb,Sic,Bd)(C1-eNe) 0.5<=a<=0.8, 0.6<=b, 0<=c<=0.1, 0<=d<=0.1, 0<=c+d<=0.1, a+b+c+d<1, 0.5'e<=1 (where a, b, c, and d denote respectively the atomic ratios Al, Cr, Si, and B, and e denotes the atomic ratio of N.)