| 摘要 |
PROBLEM TO BE SOLVED: To provide a small and simple electron accelerator for an electron beam device which facilitates maintenance of the electron beam device and dispenses with highly-trained personnel for vacuum technique and accelerator technique. SOLUTION: The electron accelerator includes a vacuum chamber 46 having an electron beam exit window 24, which is bonded airtightly to and sealed by the electron beam exit window 24 formed of a metal foil through intermetallic contact to thereby maintain vacuum continuously; an electron generator 31 positioned within the vacuum chamber 46 for generating electrons; and a housing 30 surrounding the electron generator. The housing 30 has a first series of openings, formed in the housing part between the electron generator 31 and the exit window 24 for allowing electrons to accelerate from the electron generator 31 out the exit window 24 as an electron beam, when a voltage is applied between the housing 30 and the exit window 24. COPYRIGHT: (C)2008,JPO&INPIT
|
