发明名称 BLISTER RESISTANT OPTICAL COATINGS
摘要 <p>An optical coating and method for coating an optical element are disclosed. The optical element substrate may be made of fused silica and the coating may include a non-fluoride adherence layer such as SiO&lt;SUB&gt;2&lt;/SUB&gt; that is deposited on the substrate to overlay and contact a surface of the substrate. The coating may further include a multilayer system having at least one layer of a dielectric fluoride material, the multilayer system overlaying the non-fluoride adherence layer.</p>
申请公布号 WO2007050458(A2) 申请公布日期 2007.05.03
申请号 WO2006US41053 申请日期 2006.10.20
申请人 CYMER, INC.;MELCHIOR, JOHN, T. 发明人 MELCHIOR, JOHN, T.
分类号 B32B15/04;B32B9/00;B32B19/00 主分类号 B32B15/04
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