发明名称 |
BLISTER RESISTANT OPTICAL COATINGS |
摘要 |
<p>An optical coating and method for coating an optical element are disclosed. The optical element substrate may be made of fused silica and the coating may include a non-fluoride adherence layer such as SiO<SUB>2</SUB> that is deposited on the substrate to overlay and contact a surface of the substrate. The coating may further include a multilayer system having at least one layer of a dielectric fluoride material, the multilayer system overlaying the non-fluoride adherence layer.</p> |
申请公布号 |
WO2007050458(A2) |
申请公布日期 |
2007.05.03 |
申请号 |
WO2006US41053 |
申请日期 |
2006.10.20 |
申请人 |
CYMER, INC.;MELCHIOR, JOHN, T. |
发明人 |
MELCHIOR, JOHN, T. |
分类号 |
B32B15/04;B32B9/00;B32B19/00 |
主分类号 |
B32B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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