| 摘要 |
The presence of defects in a wiring pattern is checked by a visual method, by image processing, or the like, and when a defect is detected, information such as the position, coordinates, and size of the defect is confirmed, the type of defect is confirmed, and a processing method and processing conditions are set in accordance with the defect type and conditions (step S 1 ). Shorting defects are corrected based on the processing method and processing conditions that have been set and the defect information that has been confirmed (step S 2 ). Subsequently, disconnection defects are corrected based on the set processing method and processing conditions and the confirmed defect information (step S 3 ). Upon completion of these correction operations, a determination is made as to whether the defects have been corrected (step S 4 ). By this means, the operating time for wiring correction can be shortened, and automation facilitated.
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