发明名称 |
DISPLACEMENT LIQUID FOR SEMICONDUCTOR CIRCUIT PATTERN DRYING, AND DRYING METHOD |
摘要 |
Problem: An object of the present invention is to provide a replacement solution for drying a semiconductor pattern and a method for drying a semiconductor pattern, that can prevent breakdown of an intricate semiconductor pattern with a high aspect ratio, when drying after a washing process after edging is completed in a semiconductor manufacturing process. Resolution Means: The present invention provides a replacement solution for drying a semiconductor pattern and method, containing a hydrofluoro ether and/or hydrofluorocarbon, that is completely miscible with isopropyl alcohol, has a boiling point of 70C or higher, and has surface tension under atmospheric conditions of 10 mN/m or lower when heated to a temperature below the boiling point. |
申请公布号 |
SG11201610360V(A) |
申请公布日期 |
2017.01.27 |
申请号 |
SG11201610360V |
申请日期 |
2015.06.11 |
申请人 |
DUPONT-MITSUI FLUOROCHEMICALS CO. LTD |
发明人 |
KIKUCHI, HIDEAKI;MATSUMOTO, TAKANORI;ITO, MIKI |
分类号 |
H01L21/67;H01L21/02 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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