发明名称 CHIP SUCH AS MEMS AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a chip manufacturing method, wherein the operability is improved to reduce the cost. SOLUTION: Prepared is a chip array body (6) including: a first substrate (1) where elements (1A to 1I) as chips (7A to 7I) and adjacent portions (1A to I1) adjacent to the elements (1A to 1I) are arrayed; and a second substrate and a third substrate (2, 3) disposed with the first substrate (1) interposed therebetween and joined to the first substrate (1). The second substrate and third substrate (2, 3) are cut between the elements (1A to 1I) and adjacent portions (1A to 1I). COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009004540(A) 申请公布日期 2009.01.08
申请号 JP20070163640 申请日期 2007.06.21
申请人 DAINIPPON PRINTING CO LTD 发明人 MOCHIZUKI HIROTO
分类号 H01L21/301;B81C99/00 主分类号 H01L21/301
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