| 摘要 |
PROBLEM TO BE SOLVED: To shorten the lengths of rotating shafts in a two-shaft vacuum pump provided with magnetic bearings.SOLUTION: A vacuum pump comprises: two rotating shafts that are arranged in parallel and synchronously rotate on two respective axes; and magnetic bearings that support the two rotating shafts at both ends of the respective rotating shafts. The magnetic bearings comprise: bearing rotors that have a cylindrical cup-like shape, include a magnetic material, and rotate together with the rotating shafts; first electromagnets that are arranged in parallel with the axes inside the bearing rotors; second electromagnets that are arranged perpendicularly to the axes inside the bearing rotors and generate magnetic attraction force in the direction of the axes at both ends of the rotating shafts. |
