THERMALLY STABLE HIGH TEMPERATURE PRESSURE AND ACCELERATION OPTICAL INTERFEROMETRIC SENSORS

摘要

Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.

主权项

1. A sensor assembly, comprising:
a diaphragm configured to deflect responsive to an applied stimulus; a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm, the sensing optical interferometer is configured to interact with received first light to produce a measurement light signal corresponding to the applied stimulus; a reference optical interferometer having a second optical cavity in communication with a diaphragm support structure, the reference optical interferometer is configured to interact with received second light to produce a reference light signal; and a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.