| 摘要 |
PROBLEM TO BE SOLVED: To suppress discharge defects caused by foreign matters such as dust generated during the manufacturing or use of an inkjet recording head. SOLUTION: The method of manufacturing an inkjet head includes: a step of preparing an Si substrate 1; a step of forming, on a first surface of the Si substrate 1, an SiN film 4 serving as a perforated filter mask, and a membrane having an SiO<SB>2</SB>film layer covering the first surface in such a manner that the first surface is not exposed from the plurality of perforations; a step of forming a close contact enhancing layer 7 on the membrane; a step of forming a coating resin layer 9 for constituting an ink ejection port 11 and an ink channel on the close contact enhancing layer (polyether amide resin layer) 7; a step of forming an ink supply port 11 on the Si substrate 1 by anisotropic etching from the side of a second surface facing the first surface of the Si substrate 1; and a step of forming a membrane filter structure 16 at a portion of the close contact enhancing layer 7 positioned at an opening of the ink supply port 13 with the perforated layer of the membrane serving as a mask. COPYRIGHT: (C)2010,JPO&INPIT
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