Failure analysis vehicle for yield enhancement with self test at speed burnin capability for reliability testing

摘要

A test vehicle for evaluating a manufacturing process for integrated circuits that uses a more space efficient layout of library driving cells arranged to produce circuits that exercise many interconnections that may be designed at the minimum design parameters of a manufacturing process. The cells can be configured to operate as ring oscillators increasing the effective circuit frequency of the test module allowing higher frequency circuit testing, and shortening the time it takes to perform life cycle testing. Visibly marking cells, combined with electrically isolating error prone circuit segments makes, identifying defects much more efficient. The accessibility of many testing methods allows quick location of root cause failures, which allows improvements to be made to the manufacturing process.