| 发明名称 |
APPARATUS FOR SENSING A LEVEL OF A PROCESSING MEDIUM IN A DELIVERY APPARATUS |
| 摘要 |
Embodiments of apparatus for sensing a level of a processing medium in a chemical delivery apparatus are provided herein. In some embodiments, a chemical delivery apparatus includes: a support structure; a container coupled to the support structure to hold a chemical precursor within an interior of the container; an excitation source configured to cause vibrations in an exterior surface of the container; and a measurement device configured to measure a frequency of the vibrations. |
| 申请公布号 |
US2016363478(A1) |
申请公布日期 |
2016.12.15 |
| 申请号 |
US201615179864 |
申请日期 |
2016.06.10 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GUNGOR Faruk |
| 分类号 |
G01H9/00;G01P15/09 |
主分类号 |
G01H9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A chemical delivery apparatus, comprising:
a support structure; a container coupled to the support structure to hold a chemical precursor within an interior of the container; an excitation source configured to cause vibrations in an exterior surface of the container; and a measurement device configured to measure a frequency of the vibrations. |
| 地址 |
Santa Clara CA US |
