摘要 |
PROBLEM TO BE SOLVED: To realize an element structure which has secure operation, and which is capable of manufacture with a high productivity process. SOLUTION: There are provided a carbon nanotube 2 oriented perpendicularly to a principal surface of a substrate 1; a first laminate electrode 3 consisting of an insulating layer 5/a first electrode 4/an insulating layer 5 disposed adjoining the carbon nanotube 2, and a second laminated electrode 6 consisting of the insulating layer 5/second electrode 7/insulating layer 5 facing laminated electrode 3 putting the carbon nanotube 2 between it and the first laminated electrode. COPYRIGHT: (C)2007,JPO&INPIT |