发明名称 ELECTRON DEVICE USING PERPENDICULAR ORIENTATION CARBON NANOTUBE
摘要 PROBLEM TO BE SOLVED: To realize an element structure which has secure operation, and which is capable of manufacture with a high productivity process. SOLUTION: There are provided a carbon nanotube 2 oriented perpendicularly to a principal surface of a substrate 1; a first laminate electrode 3 consisting of an insulating layer 5/a first electrode 4/an insulating layer 5 disposed adjoining the carbon nanotube 2, and a second laminated electrode 6 consisting of the insulating layer 5/second electrode 7/insulating layer 5 facing laminated electrode 3 putting the carbon nanotube 2 between it and the first laminated electrode. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007103529(A) 申请公布日期 2007.04.19
申请号 JP20050289367 申请日期 2005.09.30
申请人 FUJITSU LTD 发明人 NAKAMURA SHUNJI;MIMURA TOKUJI;AWANO YUJI
分类号 H01L29/66;B82B1/00;H01H59/00;H01L29/06 主分类号 H01L29/66
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