HETEROLEPTIC CYCLOPENTADIENYL TRANSITION METAL PRECURSORS FOR DEPOSITION OF TRANSITION METAL-CONTAINING FILMS

摘要

Methods and compositions for depositing a film on one or more substrates inciude providing a reactor with at least one substrate disposed in the reactor. At least one metal precursor are provided and at least partially deposited onto the substrate to form a metal-containing film. Methods for forming heteroleptic amidinate or guanidinate cydopentadieny! containing transition metal precursors through synthesis reactions are also included.