| 摘要 |
PROBLEM TO BE SOLVED: To provide a tracking type laser interferometer capable of automatically resetting tracking when the tracking is disabled as laser light is cut off and so on, or automating initial adjusting operation at the start of measurement.SOLUTION: A tracking type laser interferometer which irradiates a retroreflector as an object to be measured with laser light, detects displacement of the retroreflector by utilizing interference of the laser light with laser light reflected by the retroreflector in a return direction, and achieves tracking by a two-axial rotary mechanism using a shift in position of the optical axis of the reflected laser light, has an optical unit capable of emitting diffused laser light by diffusing the incident laser beam along a predetermined plane and also performing rotary operation on one axis of the two-axial rotary mechanism.SELECTED DRAWING: Figure 4 |
