| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint material discharging device capable of successfully discharging an imprint material from a discharging member while successfully removing foreign substances produced in the imprint material in a container section by a filter.SOLUTION: An imprint material discharging device includes: a container member including a container section that contains an imprint material; a channel connected to the container section; and a discharging member including a discharge port and an energy generating element. The channel has a first opening for supplying the imprint material into the channel, and a second opening for supplying the imprint material supplied from the first opening to the container section. A filter that filters the imprint material is disposed between the first opening and the second opening, and the imprint material supplied from the first opening into the channel is supplied to the container section from the second opening without passing through a region disposed between the energy generating element and the discharge port.SELECTED DRAWING: Figure 3 |
