| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which a microlens whose accuracy in shape and disposition in a plane is high is easily and inexpensively manufactured. SOLUTION: An active energy ray is emitted to a resin containing an acid generating agent that generates acid by the action of the active energy ray or a base generating agent that generates base by the action and also containing a decomposable functional group that reacts with acid or a base, thereby decomposition-desorbing one or more kinds of low boiling point volatile substances. Thereafter, the resin is subjected to a decomposition-reaction by its being heated at the decomposing reaction temperature of the decomposable functional group or higher but at the glass transition temperature of the resin or below. Thereby, the generated low boiling point volatile substance is vaporized from the resin and the volume of the resin is decreased to form recesses and projections. Thus, the microlense is manufactured. COPYRIGHT: (C)2008,JPO&INPIT |
