LAMINATE, ABRASIVE AND GRINDING MATERIALS MADE BY USING THE SAME, AND PROCESS FOR FORMATION OF THE LAMINATE

摘要

A laminate capable of abrading and grinding the surface of a high-hardness material such as diamond, sapphire or hard carbon film speedy and easily with high flatness and precision is provided by utilizing a carbon film having high close adhesion to a substrate, high hardness and high surface flatness without using diamond abrasive grains or alkali slurry. The invention relates to a laminate comprising a substrate and a carbon layer formed on the substrate which is characterized in that the carbon layer comprises diamond fine particles obtained by impact pulverization, a formation/growth inhibitor capable of inhibiting the formation of impurities hindering the growth of carbon particles and/or inhibiting the growth of carbon particles, and carbon particles, with the content of the inhibitor (per unit volume) decreasing from the substrate-side bottom layer toward the top layer. The formation/growth inhibitor is preferably SiO₂ or Al₂O₃, while an adhesion improving layer made of titanium, a titanium alloy or the like may be formed between the substrate and the carbon layer.