| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method capable of high-speed accurate machining by using a highly repetitive femtosecond laser machine. <P>SOLUTION: Disclosed is the laser machining apparatus which has the femtosecond laser machine, an optical means of guiding femtosecond laser light to a condensing optical system, and a means of moving relative positions of the laser light and a work along a plurality of axes and subjects the surface or the inner part of the work to line or spot machining of≤100μm with a fluence of≤20 J/cm<SP>2</SP>by pulse irradiation of≥10,000 times per second. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
