发明名称 GRADIENT THIN FILMS
摘要 An article comprising a thickness of a first film from a surface of the article, the first film having a gradient chemical composition within at least a portion of the thickness of the first film in a vertical and/or horizontal direction relative to the surface of the article, and methods and systems for producing same.
申请公布号 EP3080331(A1) 申请公布日期 2016.10.19
申请号 EP20140780989 申请日期 2014.09.19
申请人 THE BOEING COMPANY 发明人 RANADE, ALPANA;MATOS, MARVI A.
分类号 C23C16/453;C23C16/455 主分类号 C23C16/453
代理机构 代理人
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