| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of conventional ceramic heater that there is an apprehension of generating particles of ceramic fiber of heat insulation material during heating in case of using a heating device using the ceramic fiber for heat treatment of semiconductor wafer or the like, and that impurities stick on the semiconductor wafer, and that cleaning of the heating device takes much labor. SOLUTION: The ceramic heater is composed of a ceramic heater mold body 1, a heating element arranged in the ceramic heater mold body 2, and a heat resistant polyimide coating film 2. By the above, since the particles are not generated from the ceramic fiber of the heat insulation material even if the ceramic heater is used for a semiconductor heating device for long period, the ceramic heater can be used in a clean room of a semiconductor manufacturing device, piping, related equipment or the like. COPYRIGHT: (C)2007,JPO&INPIT
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