Method for measuring characteristics of sample

摘要

A method for measuring characteristics of a sample is provided. The method includes the following steps: obtaining an interference spectrum of the sample; transforming the interference spectrum into a temporal interference signal via a Fourier transform, in which the temporal interference signal includes a plurality of coherence wave packets; separating the wave packets; transforming the wave packets into a plurality of interface interference signals via an inverse Fourier transform; and fitting a plurality of factors of the interface interference signals into a model for obtaining the refractive indexes, the extinction coefficients, and a thickness of the sample.

主权项

1. A method for measuring characteristics of a sample, the method comprising:
obtaining an interference spectrum of the sample, wherein the interference spectrum is measured by an interferometer, the interferometer includes a broadband light source, the light source emits a broadband spectrum with a shape similar to a shape of a Gaussian function; transforming the interference spectrum into a temporal interference signal via a Fourier transform, wherein the temporal interference signal includes a plurality of coherence wave packets; separating the wave packets; respectively transforming the separated wave packets into a plurality of interface interference signals via an inverse Fourier transform; and fitting a plurality of factors of the interface interference signals into a model for obtaining refractive indexes for different wavelengths, extinction coefficients for different wavelengths, and a thickness of the sample.