发明名称 Apparatus and method of material removal with fluid flow within a slot
摘要 Apparatus and method for cleaning material at the outer edge of an object by applying a fluid, which can be a solvent, for the material to a flat surface adjacent the edge by contact and moving the solvent onto the edge by centrifugal force. A slot is provided in a planar surface. The slot is filled with solvent for contact with the flat surface of the object. The slot is arcuate and elongated. The fluid is directed along the slot in the direction of rotation by a baffle. The slot has a bottom sloping upward toward the planar surface in the direction of rotation. A notch is provided between an edge of the planar surface and the slot to act as a spillway for excess solvent.
申请公布号 US4439243(A) 申请公布日期 1984.03.27
申请号 US19820404678 申请日期 1982.08.03
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 TITUS, STEPHEN D.
分类号 B05C9/12;B05C11/08;B05D1/40;B05D3/10;G03F7/16;G03F7/30;G03F7/42;G11B5/842;H01L21/027;H01L21/30;(IPC1-7):B08B7/00 主分类号 B05C9/12
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