| 摘要 |
PURPOSE:To detect a vibration of the multi-direction by one vibration sensor, and to detect easily the rolling by fixing directly a laser medium and one reflecting mirror to a substrate, and fixing the other reflecting mirror to the substrate through a frame. CONSTITUTION:A vibration sensor consists of a laser material 11, two reflectors 12, 13 which are opposed to each other by placing said material between them, and a substrate 14. The laser material 11 and one reflecting mirror 12 are fixed directly to the substrate 14, and the other reflecting mirror 13 is fixed to the substrate 14 through a frame 15. As for a supporting method of the reflecting mirror 13, a helical spring 16 is interposed between the reflecting mirror 13 and the frame 15 as shown in the figure, and the reflecting mirror 13 is supported in a state that it can move in both the optical axis direction and the direction orthogonal to the optical axis in accordance with the vibration. Accordingly, the vibration sensor which has supported the reflecting mirror 13 by such a method can detect easily not only the vibration of the multi- direction but also the rolling. |
