| 摘要 |
PURPOSE:To stabilize the corrective stock removal of a microscopic part as well as to make highly accurate polishing performable, by variably controlling either of tape travel speed and relative displacement speed on the basis of input data corresponding to the working quantity of a polishing surface and the polishing position. CONSTITUTION:In this device, there is provided with a controlling computer 110 which variably controls either of at least travel speed of a lap tape 39 and relative displacement speed of a traveling device on the basis of input data corresponding to the working quantity of a polishing surface of a workpiece 1 and the working position. And, the relative position and the relative displacement speed between a nose 38 and the workpiece 1 and the travel speed of the lap tape 39 are all variably controlled by the controlling computer 110 according to the working quantity and the working position of the workpiece 1. Therefore, since stock removal is determined by polishing speed and working time, the working quantity is precisely controllable with the preset input data, thus partial corrective polishing can be done very precisely and highly accurately. |
