发明名称 Chemical Sensors Based on Plasmon Resonance in Graphene
摘要 Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.
申请公布号 US2016341663(A1) 申请公布日期 2016.11.24
申请号 US201615225378 申请日期 2016.08.01
申请人 International Business Machines Corporation 发明人 Avouris Phaedon;Farmer Damon B.;Li Yelei;Yan Hugen
分类号 G01N21/552;H01L21/04;H01L21/56;H01L21/02 主分类号 G01N21/552
代理机构 代理人
主权项 1. A method of analyzing a sample using a graphene-based SPR sensor, comprising the steps of: depositing the sample on the graphene-based SPR sensor, wherein the graphene-based SPR sensor comprises a conductive layer, a dielectric layer on the conductive layer, and graphene on a side of the dielectric layer opposite the conductive layer, and wherein the sample is deposited onto the graphene; passing light through the sample and the graphene-based SPR sensor, wherein the light induces a plasmon resonance in the graphene, and wherein, by way of an interaction between the plasmon resonance in the graphene and vibrational dipole moments in the sample, an intensity of the light is changed as it passes through the graphene-based SPR sensor; and detecting the intensity of the light that has passed through the sample and the graphene-based SPR sensor, wherein the intensity of the light detected represents molecular properties of the sample.
地址 Armonk NY US