| 摘要 |
PURPOSE: To obtain the optical inspection method and the apparatus for this method, wherein the erroneous recognition in image processing is eliminated, and to provide the apparatus, which can perform the automatic optical inspection, by avoiding the irregular reflection of illuminating light by the scratch of a protecting film, and distinguishing the scratch of the protecting film and the defect in the lighting state (scratch of a polarizing plate). CONSTITUTION: An LCD (liquid crystal display element) 11 is mounted on an XY stage. Liquid droplets are dropped on the surface of a protecting film 25, and a film 30 of the droplets is formed. A lamp 13 is lit, and the lighting inspection of the LCD 11 is performed. At this time, the image of the surface of the protecting film 25 is picked up with a camera 14. The output of the camera 14 is inputted into an image processing computer 18, and the good/bad states are discriminate The noise signal caused by a scratch 29 of the protecting film 25 is not inputted into the camera 14, and the erroneous recognition and the erroneous judgment can be completely eliminated. |
