| 摘要 |
PROBLEM TO BE SOLVED: To provide a clamp device, a substrate carry-in/carry-out device using the clamp device, and a substrate processing device, which are capable of reducing scattering of particles in a clamp mechanism that is necessary in extracting a substrate from a substrate housing container such as a FOUP to carry the substrate into a substrate conveyance region and is used for fixing the substrate housing container.SOLUTION: A clamp device 100 includes: a clamp member 81 that in opening/closing a lid 68 provided at a front face of a substrate housing container C, is capable of coming into contact with the substrate housing container from above to fix the substrate housing container at a predetermined position; drive mechanisms 86, 87 for driving the clamp member; a casing 85 for covering the drive mechanisms; an exhaust hood 90 that includes a suction port 91 communicating with the casing and is provided in the vicinity of the casing; and a fan 94 provided inside the exhaust hood.SELECTED DRAWING: Figure 7 |
