SOUND CONVERTER ARRANGEMENT WITH MEMS SOUND CONVERTER

摘要

The present invention relates to a sound converter arrangement (1) having a first MEMS sound converter (21) for generating and/or detecting soundwaves in the audible wavelength spectrum which comprises a first cavity (41) and an ASIC (11) which is electrically connected to the first MEMS sound converter. According to the invention, the ASIC (11) is embedded in a first substrate (10), and the first MEMS sound converter (21) is arranged on a second substrate (20). In addition there is provision that the first substrate (10) and the second substrate (20) are electrically connected to one another, and that the first cavity (41) is formed at least partially in the first and/or second substrate (10, 20).