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发明名称
PATTERN FORMATION FOR DEVICE SUBSTRATE
摘要
申请公布号
JPS6046551(A)
申请公布日期
1985.03.13
申请号
JP19840104861
申请日期
1984.05.25
申请人
AMERIKAN TEREFUON ANDO TEREGURAFU CO
发明人
HARORUDO JIEEN KUREIGUHETSUDO;RICHIYAADO EDOUIN HAWAADO;ROORENSU DEIBUITSUDO JIYATSUKURU;JIYONASAN KAATEISU HOWAITO
分类号
G03F7/20;G03C1/72;G03C5/08;G03F7/039;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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