DEVICE AND METHOD OF DETECTING DEFECT IN SURFACE REGION AND REGION UNDER SURFACE OF SEMI-CONDUCTIVE MATERIAL OR CONDUCTIVE MATERIAL,申请号JP19840260597-传众专利搜索

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发明名称	DEVICE AND METHOD OF DETECTING DEFECT IN SURFACE REGION AND REGION UNDER SURFACE OF SEMI-CONDUCTIVE MATERIAL OR CONDUCTIVE MATERIAL
摘要
申请公布号	JPS60142246(A)	申请公布日期	1985.07.27
申请号	JP19840260597	申请日期	1984.12.10
申请人	GENERAL ELECTRIC CO	发明人	JIYON RUUDEIGAA MEIDAA BIARU;MEDERITSUKU EDOMONDO OOGAA
分类号	G01N27/82;G01N27/90	主分类号	G01N27/82
代理机构		代理人
主权项
地址

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