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发明名称
摘要
申请公布号
JPS6212625(B2)
申请公布日期
1987.03.19
申请号
JP19810146415
申请日期
1981.09.18
申请人
VARIAN ASSOCIATES
发明人
DEBITSUDO AASAA ROBAATOSON;NOOMAN REONAADO TAANAA
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
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代理人
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