| 摘要 |
PURPOSE:To reduce misdecision by finding statistical properties by respective area images obtained by dividing a masked noninspection image and excluding an area whose masking area exceeds a preset rate from objects of inspection. CONSTITUTION:An image obtained by picking up a wafer is A/D-converted 4a, stored in a 1st image memory, and further operated logically by a logical operation circuit 4d with a mask image stored image stored in a 2nd image memory 4c by picture elements to delete parts which need not be detected, so that only a part which is preprocessed on the wafer is stored in a 3rd image memory 4e. Further, the image stored in the 3rd image memory 4e is divided by an arithmetic circuit 4f into rectangular parts to calculate a statistical quantity after detection parts which do not suit to inspection are removed or to remove the detection parts which do not suit to the inspection after the statistical quantity is computed, thereby inspecting only properly inspected positions by an inspecting means.
|
