| 摘要 |
PURPOSE:To improve the detection sensitivity of a vibration without increasing the weight of a vibration body, by projecting a light beam to the vibrating body, photodetecting its reflected light, and detecting the energy per a unit area of a formed light spot. CONSTITUTION:A laser light beam from a light emitting device 15 is supplied to a vibrating body 1 through a half prism 13 and a lens 12. The light beam which is reflected by the vibrating body 1 is detected by a light receiving device 14 through the lens 12 and the half prism 13. The output signal of this light receiving device 14 is led out to the outside as a vibration detecting signal through an amplifier 4 and an output device 5. In the light receiving device 14, energy per a unit area of a light spot is detected.
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