METHOD AND DEVICE FOR FORMING FILM,申请号JP19900092228-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FORMING FILM
摘要
申请公布号	JPH03290396(A)	申请公布日期	1991.12.20
申请号	JP19900092228	申请日期	1990.04.09
申请人	HITACHI LTD;HITACHI TECHNO ENG CO LTD;HITACHI KASADO ENJINIARINGU KK	发明人	TAMURA NAOYUKI;OKIGUCHI MASASHI;HITOTSUBASHI KAZUAKI
分类号	C30B23/08;H01L21/203;H01L21/205	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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