Process and apparatus for forming magnetic structures on a substrate

摘要

The invention relates to a process of and apparatus for forming a magnetic structure on a substrate and a magnetic structure formed by such a process and apparatus. The magnetic structure comprises a matrix in which magnetic particles are embedded. The apparatus for forming the magnetic structure on the substrate comprises a source of matrix deposits the matrix material onto the substrate to form the matrix, and comprises a source of magnetic particles which deposit the magnetic particles onto the matrix as the matrix forms to embed the magnetic particles in the matrix. Each magnetic particle comprises a core covered with a layer of metal, at least one of the matrix material and the core is of ferromagnetic material and the core and the layer of metal are of different materials.

主权项

1. A process of forming a magnetic structure on a substrate, the process comprising:
depositing a layer of metal onto respective particle cores so as to produce a plurality of magnetic particles comprising a core covered at least in part by a layer of such metal; depositing a matrix material onto the substrate to thereby form a matrix; and causing a beam of said magnetic particles to impinge upon the matrix as the matrix forms, thereby depositing the magnetic particles onto the matrix as the matrix forms so as to embed the magnetic particles in the matrix, wherein each magnetic particle comprises a core covered at least in part with a layer of metal, at least one of the matrix material and the core is of ferromagnetic material and the core and the layer of metal are of different materials.