FORMATION OF AMORPHOUS SILICON HYDRIDE FILM,申请号JP19920205537-传众专利搜索

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发明名称	FORMATION OF AMORPHOUS SILICON HYDRIDE FILM
摘要
申请公布号	JPH0653137(A)	申请公布日期	1994.02.25
申请号	JP19920205537	申请日期	1992.07.31
申请人	CANON INC	发明人	OMI KAZUAKI
分类号	C23C14/16;C23C14/14;C23C14/34;C23C14/35;H01L21/203;(IPC1-7):H01L21/203	主分类号	C23C14/16
代理机构		代理人
主权项
地址

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