发明名称 RADIATION SENSITIVE RESIN COMPOSITION
摘要 PURPOSE:To enhance developability, heat resistance, solubility, contrast, and resolution by incorporating a specified alkalisoluble resin and at least one of polyhydroxyl compound and its derivative. CONSTITUTION:The alkali-soluble resin having a weight average molecular weight (Mw) of 2,000-20,000 in terms of polystyrene and at least one of the polyhydroxyy compound and its derivative represented by formula I in which each of X<1>-X<13> is H, alkyl, alkoxy, or 0D; D is H or an organic group having a 2-quinonedi-azido group; each of (X<1>-X<3>) and (X<4>-X<6>) has at least one 0D group; and R is H or alkyl.
申请公布号 JPH0689026(A) 申请公布日期 1994.03.29
申请号 JP19910244397 申请日期 1991.08.29
申请人 JAPAN SYNTHETIC RUBBER CO LTD 发明人 INOMATA KATSUMI;OTA TOSHIYUKI;ISAMOTO YOSHITSUGU;MIURA TAKAO
分类号 G03F7/022;G03F7/039;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/022
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