| 摘要 |
<p>PURPOSE: To decrease the numbers of joints, welding places, and tubes required for piping. CONSTITUTION: The fluid control unit 1 is equipped with a mass-flow controller 2, two on-off valves 3 and 4 provided on the entrance side of the mass-flow controller 2, and three on-off valves 5, 6, and 7 provided on the exit side of the mass-flow controller 2. On the entrance side, the on-off valve 4 for main fluid is put over the on-off valve 3 for purging fluid and on the exit side. On the other hand, the on-off valve for exhaustion is put over the on-off valve 5 for vacuum suction and the on-off valve 7 for a main passage is further put over it.</p> |
