| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam chamber and manufacturing method thereof whereby the seal property of the chamber is greatly improved, the gas injection frequency is reduced, the discharge stability is improved to prolong the life, and the fluoridizing can be made, without deteriorating the seal property. SOLUTION: This chamber has a hard alloy region harder than an Al alloy at seal contact parts and hence grooves are cut into seal contact parts of Al alloy-made housing members, alloy members are buried in the grooves and locally molten, together with the contact parts of the housing members to form hard alloy regions and housing members are sealed mutually through a seal member to assemble the chamber. |
