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发明名称
VERFAHREN UND VORRICHTUNG ZUM GEZIELTEN EINBRINGEN VON DOTIERUNGSSTOFFEN IN HALBLEITERKRISTALLEN BEIM TIEGELFREIEN ZONENSCHMELZEN
摘要
申请公布号
DE2338338(A1)
申请公布日期
1975.02.13
申请号
DE19732338338
申请日期
1973.07.27
申请人
SIEMENS AG
发明人
KELLER,WOLFGANG,DR.
分类号
C30B13/10;H01L21/208;(IPC1-7):01J17/08
主分类号
C30B13/10
代理机构
代理人
主权项
地址
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