| 发明名称 |
Anode for magnetic sputtering of gradient films |
| 摘要 |
An improved anode system for producing uniform gradient coatings by magnetic sputtering is disclosed, comprising a pair of anode plates asymmetrically designed and positioned along the length of the cathode.
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| 申请公布号 |
US4744880(A) |
申请公布日期 |
1988.05.17 |
| 申请号 |
US19840661748 |
申请日期 |
1984.10.17 |
| 申请人 |
PPG INDUSTRIES, INC. |
发明人 |
GILLERY, F. HOWARD;CRISS, RUSSELL C. |
| 分类号 |
H01J37/34;(IPC1-7):C23C14/34 |
主分类号 |
H01J37/34 |
| 代理机构 |
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