| 摘要 |
PROBLEM TO BE SOLVED: To realize a phase modulated elliptical polarization method in which the accuracy is enhanced in measurement by solving the problem of periodic oscillation. SOLUTION: Measurements Iom , Ism and Icm are derived from a signal 50 indicative of measured intensity I(t) . At the first step 51, Fourier components S0 , S1 , S2 are calculated for a continuous and modulated pulsesω, 2ωand at the second step 52, measurements Iom , Ism and Icm are determined from the components S0 , S1 , S2 . Method of iteration 53 is applied to the measurements and initial theoretical values Is1 /Io1 and Ie1 /Io1 are derived from an input variable 55. The theoretical values obtained at Step 57 are compared with the Ism /Iom and Icm /Iom determined at Step 52. The comparison 58 requires quantization of the difference between theoretical value and measured value. When the difference is smaller than a limit value, the measurements are approximated sufficiently and a numeral 54 is provided as a physical variable for calculating the measurement. After ending the comparison 58, an estimated value 59 following to the physical variable is specified.
|
