发明名称 Method for forming a thin film of a non-stoichiometric metal oxide
摘要 A method for forming a thin film (220) of luminescent zinc oxide includes the steps of: (i) providing a mixture (170) of powdered zinc oxide and powdered graphite, (ii) providing a substrate (140) at a distance of about 9 millimeters from the mixture (170), (iii) disposing the mixture (170) and substrate (140) within an apparatus (100) that provides a confined environment having a partial pressure of oxygen of about 0.21 atmospheres, (iv) heating the mixture (170) to a temperature of about 850 degrees Celsius, and (v) establishing a temperature gradient between the substrate (140) and the mixture (170) of about 15 degrees, the temperature of the substrate (140) being less than the temperature of the mixture (170).
申请公布号 US5750188(A) 申请公布日期 1998.05.12
申请号 US19960705361 申请日期 1996.08.29
申请人 MOTOROLA, INC. 发明人 MENU, ERIC P.
分类号 C09K11/08;C09K11/60;C23C14/00;C23C14/08;(IPC1-7):B05D5/13 主分类号 C09K11/08
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