| 摘要 |
PROBLEM TO BE SOLVED: To obtain a scanning near-field microscope capable of observing the potential distribution of the surface of a sample with high resolving power, in addition to the shape image and two-dimensional optical characteristic image of the surface of the sample. SOLUTION: In a scanning near-field microscope vibrating a photoconductive probe 1 in its resonance frequency to perform scanning control atomic force microscope(AFM) of dynamic mode, the photoconductive probe 1 is set to ground potential, and AC voltage is applied to a sample 3 and the displacement detection signal of the photoconductive probe 1 is separated in frequency by using a frequency separating circuit 24 to obtain a surface potential signal. At the same time, near-field light is emitted from the micro-opening provided to the leading tip of the photoconductive probe 1 to measure the optical characteristics of the sample 3 to simultaneously measure the surface shape, surface potential and optical characteristics of the sample.
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