发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT FOR EVALUATING FILLING MATERIAL BEING CONTAINED IN SEALING RESIN AND EVALUATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit (test chip) for quantitatively evaluating an effect which is exerted on the semiconductor integrated circuit by filling materials being contained in a sealing resin. SOLUTION: A filling material capture dam 11 is formed on a protective film 4 of an active element of a circuit which can make a test of electrical characteristics and a function, whereby filling material capture slits 12 are provided in the dam 12 to contrive to make it possible to efficiently capture filling materials 8.
申请公布号 JP2001168241(A) 申请公布日期 2001.06.22
申请号 JP19990346410 申请日期 1999.12.06
申请人 OKI ELECTRIC IND CO LTD 发明人 TAKAHARA MASARU
分类号 H01L21/56;G01R31/28;H01L21/66;H01L23/29;H01L23/31;H01L23/544;(IPC1-7):H01L23/29 主分类号 H01L21/56
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