| 摘要 |
PROBLEM TO BE SOLVED: To provide a feed mechanism for a stage which enhances operability and by which a measuring operation can be performed simply. SOLUTION: An operation-part mainframe 20 is attached to the front of the stage 3. A feed screw shaft 21 whose outer circumference is threaded and a changeover shaft 22 at which a coarse-adjustment changeover sleeve 40 comprising a cam is installed are arranged in parallel at the inside of the mainframe 20, and they are supported by the mainframe 20 so as to be rotatable. A coarse- adjustment changeover handle 31 which turns the changeover shaft 22 and a fine-adjustment feed handle 32 which turns the screw shaft 21 are installed side by side on the right side of the mainframe 20. Two leaf springs 12 to which feed nuts 13 engaged with the screw shaft 21 are fixed respectively at the inside are attached to a fixation member 2 by sandwiching the shafts 21, 22. The leaf springs 12 are deformed to a direction in which the feed nuts 13 and the feed screw shaft 21 are engaged and separated by the cam which is turned together with the changeover shaft 22. Consequently, the coarse adjustment and the fine adjustment of the stage 3 can be changed over.
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