Wafer-level testing of optical circuit devices

摘要

An apparatus comprising a wafer substrate having a planar optical layer thereon and a plurality of adjacent pairs of sacrificial optical testing parts and optical circuit parts located on the optical layer. The sacrificial testing part includes a vertical optical coupler that is oriented to redirect a test light signal between a direction substantially non-parallel to the planar optical layer and a direction that is substantially parallel to the planar optical layer. The optical circuit part includes an optical edge coupling port oriented to permit transfer of the test light signal through the optical edge coupling port and between the sacrificial testing part and the optical circuit part. The apparatus also comprises a trench located in the planar optical layer, the trench separating the sacrificial testing part from the optical circuit part for each of the plurality of adjacent pairs such that the test light signal passes across the trench between the sacrificial testing part and the optical circuit part.

主权项

1. An apparatus, comprising:
a wafer substrate having a planar optical layer thereon; a plurality of adjacent pairs of sacrificial optical testing parts and optical circuit parts located on the optical layer, wherein:
the sacrificial testing part includes a vertical optical coupler that is oriented to redirect a test light signal between a direction substantially non-parallel to the planar optical layer and a direction that is substantially parallel to the planar optical layer, andthe optical circuit part includes an optical edge coupling port oriented to permit transfer of the test light signal through the optical edge coupling port and between the sacrificial testing part and the optical circuit part; and a trench located in the planar optical layer, the trench separating the sacrificial testing part from the optical circuit part for each of the plurality of adjacent pairs such that the test light signal passes across the trench between the sacrificial testing part and the optical circuit part.