Method and apparatus for MEMS optical sensing using micromirrors

摘要

An optical sensing device uses a set of source mirrors directing light from a set of light sources to a movable collector mirror. Each of the light sources has a unique wavelength. The collector mirror is coupled to a MEMS actuator that moves the collector mirror in response to a physical phenomena. A light collector gathers light from the collector mirror and the physical phenomena can be measured by determining the relative intensity associated with each of the light sources in the light gathered at the collector.